Preparation of Superconducting NbN Film

Preparation of Superconducting NbN Film

Author Name : B. Prabhakar, Basant Kumar Das, Tanveer Ahmad Wani

ABSTRACT: The NbN films are prepared by using the DC magnetron sputtering technique. The film NbN phase structure is investigated by using the XRD technique in this process. The deposition of thin film at room temperature and vary the sputtering power between 54 w to 135w. After deposition of the film record the XRD patters at different powers. The temperature dependence of resistance is measured from 4.2k to 300k.The substrate varying temperature between 30 and 800 ℃ and records the XRD patterns of film NbN. So the NbN film formed deposition at different temperatures and plot the resistivity verses temperature. Observe this plot, the high SC temperature is 16.2K is obtained at 600℃.The superconducting temperature is decreases slightly to15.8K at substrate temperature is 800℃. Take the SEM morphologies of the NbN film at -50℃, room temperature, 375℃ and 600℃.The trasmitance of the film at various thicknesses are noted in this process. The transmission of the films is deposited at different substrate temperatures -50℃ to 600℃. The results of XRD and SEM represent the lower the temperature, and small size of the grains.